Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462331 | Method for monitoring turbo pump operation in an ion implantation apparatus | Dong-Ha Lim, Hyo-Sang Jung, Sung Kyu Han | 2002-10-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462331 | Method for monitoring turbo pump operation in an ion implantation apparatus | Dong-Ha Lim, Hyo-Sang Jung, Sung Kyu Han | 2002-10-08 |