Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8555810 | Plasma dry etching apparatus having coupling ring with cooling and heating units | Min-Joon Park | 2013-10-15 |
SK
Su-Hong Kim
Overall (All Time): #3,179,355 of 4,157,543Top 80%
1
Patents All Time