Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8458624 | Method for manufacturing semiconductor device by correcting overlapping shots based on a radiation influenced pattern | Jin Woo CHOI, Sang-Hee Lee | 2013-06-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8458624 | Method for manufacturing semiconductor device by correcting overlapping shots based on a radiation influenced pattern | Jin Woo CHOI, Sang-Hee Lee | 2013-06-04 |