SL

Seok-Kyun Lee

Samsung: 2 patents #37,631 of 75,807Top 50%
Overall (All Time): #2,100,990 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
7868488 Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus — 2011-01-11
7633186 Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus — 2009-12-15