Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423639 | Planarization method of insulating layer for semiconductor device | — | 2002-07-23 |
| 6218291 | Method for forming contact plugs and simultaneously planarizing a substrate surface in integrated circuits | Bo-Un Yoon | 2001-04-17 |
| 6214735 | Method for planarizing a semiconductor substrate | Chang-gyu Kim, Ji Hyun Choi | 2001-04-10 |
| 6083826 | Method for manufacturing semiconductor device capable of improving planarization | Chang-gyu Kim | 2000-07-04 |
| 6071792 | Methods of forming shallow trench isolation regions using plasma deposition techniques | Chang-gyu Kim, Min BAEK | 2000-06-06 |