Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5880355 | Apparatus for measuring contamination particles during the manufacture of semiconductor devices | Jin-Sung Kim, Hee-se Kang, Sang-young Moon | 1999-03-09 |
| 5782984 | Method for cleaning an integrated circuit device using an aqueous cleaning composition | Kwang-Shin Lim | 1998-07-21 |