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Metal triamine compound, method for preparing the same, and composition for depositing metal-containing thin film including the same |
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Transition metal compound, preparation method therefor, and composition for depositing transition metal-containing thin film, containing same |
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Organometallic precursors and methods of forming thin layers using the same |
Youn-Joung Cho, Youn Soo Kim, Myong Woon Kim, Sang Ick Lee, Sang-Chul Youn |
2018-04-10 |
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Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same |
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2016-12-06 |
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Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same |
Sooho Park, Seohyun Kim, Jeongwoo Park, Taejung Park, YoungZo Yoo +8 more |
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Zinc oxide precursor containing alkyl zinc halide and method of depositing zinc oxide-based thin film using the same |
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2014-10-14 |