Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9048189 | Plasma processing method of semiconductor manufacturing apparatus | Hyun-Su Jun, Ki Sang Kim, Seung-Heong Lee, Jong-Bum Kim, In-Joong Kim | 2015-06-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9048189 | Plasma processing method of semiconductor manufacturing apparatus | Hyun-Su Jun, Ki Sang Kim, Seung-Heong Lee, Jong-Bum Kim, In-Joong Kim | 2015-06-02 |