Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503072 | Methods of fabricating semiconductor devices with flattened hardmask layers | Doyoung Kim | 2019-12-10 |
| 10431506 | Method of processing substrate and method of fabricating semiconductor device using the same | Dusik Bae, Yoonmi Lee, Hyeogki Kim, JungDae Park | 2019-10-01 |
| 9829795 | Methods of fabricating semiconductor devices with flattened hardmask layers | Doyoung Kim | 2017-11-28 |