Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9570304 | Method of forming fine patterns in an anti-reflection layer for use as a patterning hard mask | Min Ju Park, Haisub Na, Hyojin Yun, Su Min Kim, Hyunwoo KIM +2 more | 2017-02-14 |
| 8846305 | Photolithography method including dual development process | Eunsung Kim, Jaewoo Nam, Chulho Shin, Shiyong Yi | 2014-09-30 |
| 8273668 | Methods of forming a pattern and methods of fabricating a semiconductor device having a pattern | Dong Ki Yoon, Shiyong Yi, Seongwoon Choi, Seokhwan Oh, Sang Ouk Kim +1 more | 2012-09-25 |