Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9233334 | Byproducts treating device and a facility for manufacturing semiconductor devices having the byproducts treating device | — | 2016-01-12 |
| 8025736 | Semiconductor device fabrication equipment for performing PEOX process and method including cleaning the equipment with remotely produced plasma | Kyoung-In Kim, Hak-Su Jung, Kyoung-Min An | 2011-09-27 |
| 7165443 | Vacuum leakage detecting device for use in semiconductor manufacturing system | — | 2007-01-23 |