Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528430 | Method of forming silicon containing thin films by atomic layer deposition utilizing Si2C16 and NH3 | Kim Yeong Kwan, Park Young Wook, Lee Joo Won | 2003-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528430 | Method of forming silicon containing thin films by atomic layer deposition utilizing Si2C16 and NH3 | Kim Yeong Kwan, Park Young Wook, Lee Joo Won | 2003-03-04 |