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Kibeom KIL

Samsung: 1 patents #49,284 of 75,807Top 70%
Overall (All Time): #2,577,395 of 4,157,543Top 65%
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Patent #TitleCo-InventorsDate
11623853 Fluid supply apparatus and substrate processing apparatus including the same Dongsoo Lee, Wooram Oh, Sangho JANG 2023-04-11