Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5938852 | Cap for vertical furnace | Hyeog Joon Ko, O-yeon Han, Yu Geun Kim | 1999-08-17 |
| 5902102 | Diffusion furnace used for semiconductor device manufacturing process | O-yeon Han | 1999-05-11 |
| 5899690 | Thermal processing apparatus for semiconductor wafer | Byung-Kwan Lee, Dong Ho Kim, Woung-kwan An | 1999-05-04 |