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Chemical mechanical polishing machine and polishing head assembly |
In Kwon Kim, Kyung-Hyun Kim, Ki-Jong Park, Jong-Heun Lim |
2019-02-05 |
| 9997412 |
Methods of manufacturing semiconductor devices |
Jaeseok Kim, Hoyoung Kim, Boun Yoon, Kyungtae Lee, Kwansung Kim +1 more |
2018-06-12 |
| 9254546 |
Chemical mechanical polishing machine and polishing head assembly |
In Kwon Kim, Kyung-Hyun Kim, Ki-Jong Park, Jong-Heun Lim |
2016-02-09 |
| 8912592 |
Non-volatile memory device including etch stop layer pattern |
Jong-Heun Lim, Hyo Jung Kim, Kyung-Hyun Kim, Chan-wook Seo, Young Beom Pyon |
2014-12-16 |
| 8575753 |
Semiconductor device having a conductive structure including oxide and non oxide portions |
Suk-Hun Choi, Yi Koan Hong, Kyung-Hyun Kim, Tae Hyun Kim, Kyung-Tae Nam +1 more |
2013-11-05 |
