Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901007 | RF sensing apparatus of plasma processing chamber and plasma processing chamber including same | Young Do Kim, Sung Yong LIM, Chan Soo Kang, Do-Hoon Kwon, Min Ju Kim +3 more | 2021-01-26 |
| 8369099 | Electronics device module | Do Hyung Kim, Hyun-Jung Yoo, Dong-Yoon Seo, In Young Park | 2013-02-05 |