Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7144601 | Method of purging photoresist from semiconductor wafer coating apparatus | Kwang Ho Lee, Jong-Hwa Lee | 2006-12-05 |
| 6896736 | Photoresist purge control of semiconductor wafer coating equipment | Kwang Ho Lee, Jong-Hwa Lee | 2005-05-24 |