Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8221045 | Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof | Jung-Hyeon Kim, Jin Ho Shin, Gennady Ivanov | 2012-07-17 |
| 6979368 | Apparatus and method for producing a semiconductor device including a byproduct control system | — | 2005-12-27 |
| 6214689 | Apparatus for manufacturing semiconductor device, method of manufacturing capacitor of semiconductor device thereby, and resultant capacitor | Jung-Kun LIM | 2001-04-10 |
| 6037272 | Apparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumps | Young Sun Kim, Jung Ki Kim | 2000-03-14 |
| 5873942 | Apparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumps | Young Sun Kim, Jung Ki Kim | 1999-02-23 |