Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897266 | Light source module and lighting apparatus including the same | Kyung Mi Moon, Sang Woo Ha, Jong Sup Song, Tetsuo Ariyoshi, Won Soo JI | 2018-02-20 |
| 6444995 | Focussing method and system of exposure apparatus | — | 2002-09-03 |
| 6056544 | Apparatus for baking resists on semiconductor wafers | — | 2000-05-02 |