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Method of fabricating semiconductor device |
Heejung KIM, Seok Won Cho, Soonmok Ha |
2018-10-09 |
| 10008505 |
Semiconductor device including capacitor and method of manufacturing the same |
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| 9941286 |
Semiconductor devices and methods for manufacturing the same |
Jaehee KIM, Soonmok Ha, Jonghyuk Kim |
2018-04-10 |
| 9721808 |
Methods of forming semiconductor devices including contact holes |
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2017-08-01 |
| 9679821 |
Methods of revising overlay correction data |
Woojin Jung, Sang Ho Yun, Un Jeon, Byeongsoo Kim, Cheolhong Kim +1 more |
2017-06-13 |
| 9666434 |
Method for forming fine patterns of semiconductor device |
Jaehee KIM, Dae Yong Kang, Soonmok Ha |
2017-05-30 |
| 9627202 |
Methods for forming fine patterns of semiconductor device |
Soonmok Ha, Sung-Wook Hwang, Dae Yong Kang, Byungjun Jeon |
2017-04-18 |
| 9099399 |
Methods of forming fine patterns for semiconductor devices |
Soonmok Ha, Eunshoo Han, Seongho Moon, Sung-Wook Hwang |
2015-08-04 |
| 9034765 |
Methods of forming a semiconductor device |
JungWoo Seo, KyoungRyul Yoon, Cheolhong Kim, Seokwoo Nam, Yongjik Park |
2015-05-19 |
