Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6198982 | Method and apparatus for detecting the presence of particles on a wafer holder of semiconductor exposure equipment | Soon-Jong Park | 2001-03-06 |
JY
Jong-soon Yun
Overall (All Time): #3,574,685 of 4,157,543Top 90%
1
Patents All Time