Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7637114 | Temperature-adjusting unit, substrate processing apparatus with the unit, and method of regulating temperature in the apparatus | Dong Hyun Choi, Moon Soo Park, Yong Dae Kim | 2009-12-29 |