Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9140742 | Method of measuring a silicon thin film, method of detecting defects in a silicon thin film, and silicon thin film defect detection device | Alexander Voronov, Seok-Ho Lee, Kyung-Hoe Heo, Gyoo-Wan Han | 2015-09-22 |