Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12224163 | Ion beam source, substrate process apparatus including the same, and method of processing a substrate using the same | Seungwan YOO, Dohyung Kim, Jaehong Park, Dong-Chan Lim | 2025-02-11 |