Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583371 | Electrostatic chuck and apparatus for processing a substrate including the same | Jin-Man Kim, Hee-Sam Kim, Jong-Bum Park, Kwang-Bo Sim, Sang-Young Lee | 2017-02-28 |