Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908506 | Method of manufacturing semiconductor device | — | 2021-02-02 |
| 9958500 | Vacuum socket and semiconductor testing system including the same | Il Sup JIN, Seungchul Lee | 2018-05-01 |
| 8981804 | Contact apparatus and semiconductor test equipment using the same | Hun-Kyo Seo, Soon-Geol Hwang | 2015-03-17 |
| 7426229 | Line narrowing module, light source of exposure apparatus comprising the same, and method of producing exposure light using line narrowing | — | 2008-09-16 |
| 7315349 | Exposure equipment with optical system positioning mechanism and related exposure method | — | 2008-01-01 |