Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8102509 | Focus and level control method for projection lens unit by comparing intensities of measurement light and reference light | — | 2012-01-24 |
| 7671969 | Semiconductor wafer flatness correction apparatus and method | — | 2010-03-02 |
| 7535551 | Projection lens unit with focus and level control, related exposure apparatus and method | — | 2009-05-19 |