Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9941135 | Methods of forming a hard mask layer and of fabricating a semiconductor device using the same | Sejun PARK, Dohyung Kim, Sangho Roh, Eunsol Shin, Seung Moo Lee +1 more | 2018-04-10 |
| 9812331 | Apparatus for and method of processing substrate | Uihyoung Lee, Donghyun Lee, Jinhyoung Kim, Sanghyun Lee, Jinho Choi | 2017-11-07 |
| 7452810 | Method of forming a barrier layer of a semiconductor device | Kyeongmo Koo, Hyeonill Um, Junhyuk Jung, Sangwook Park | 2008-11-18 |
| 7169704 | Method of cleaning a surface of a water in connection with forming a barrier layer of a semiconductor device | Kyeongmo Koo, Hyeonill Um, Sunhyuk Jung, Sangwook Park | 2007-01-30 |