Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864299 | Apparatus for supporting a wafer, apparatus for exposing a wafer and method of supporting a wafer | Jong Min Kim | 2011-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864299 | Apparatus for supporting a wafer, apparatus for exposing a wafer and method of supporting a wafer | Jong Min Kim | 2011-01-04 |