| 10971516 |
Three-dimensional semiconductor memory devices and methods of fabricating the same |
Sung-Soo Ahn, Yong-Hoon Son, Minhyuk Kim, Daehyun Jang |
2021-04-06 |
| 9978756 |
Semiconductor chips and methods of manufacturing the same |
Hyuk Kim, Seung-Pil Chung |
2018-05-22 |
| 9865540 |
Vertical memory devices and methods of manufacturing the same |
Hyuk Kim, Jong Kyoung Park, Seung-Pil Chung |
2018-01-09 |
| 9385134 |
Semiconductor device and method forming patterns with spaced pads in trim region |
Ki-Jeong Kim, Kyoung-Sub Shin, Dong Hyun Kim |
2016-07-05 |
| 9372401 |
Method of forming micropatterns |
Ki-Jeong Kim, Kyoung-Sub Shin, Dong Hyun Kim |
2016-06-21 |
| 9070448 |
Methods of forming fine patterns in semiconductor devices |
O-lk Kwon, Bum-Soo Kim, Dong Chan Kim, Myeong-Cheol Kim |
2015-06-30 |
| 8846541 |
Methods of forming fine patterns in semiconductor devices |
O-Ik Kwon, Bum-Soo Kim, Dong Chan Kim, Myeong-Cheol Kim |
2014-09-30 |
| 8637407 |
Methods of forming fine patterns in semiconductor devices |
O-Ik Kwon, Bum-Soo Kim, Dong Chan Kim, Myeong-Cheol Kim |
2014-01-28 |
| 8629052 |
Methods of forming semiconductor devices having narrow conductive line patterns |
Young-Ju Park, Myeong-Cheol Kim, Dong Chan Kim, Jae-Hwang Sim |
2014-01-14 |
| 8617998 |
Method of forming a micro-pattern for semiconductor devices |
Seong-soo Lee, Ki-Jeong Kim |
2013-12-31 |
| 8310055 |
Semiconductor devices having narrow conductive line patterns and related methods of forming such semiconductor devices |
Young-Ju Park, Myeong-Cheol Kim, Dong Chan Kim, Jae-Hwang Sim |
2012-11-13 |
| 8247291 |
Methods of forming fine patterns in integrated circuit devices and methods of manufacturing integrated circuit devices including the same |
Young-Ju Park, Myeong-Cheol Kim |
2012-08-21 |
| 8110506 |
Methods of forming fine patterns in semiconductor devices |
O-Ik Kwon, Bum-Soo Kim, Dong Chan Kim, Myeong-Cheol Kim |
2012-02-07 |
| 7727893 |
Method of forming a dielectric layer pattern and method of manufacturing a non-volatile memory device using the same |
Dong Hyun Kim |
2010-06-01 |
