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Semiconductor devices having improved electrical characteristics and methods of fabricating the same |
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Semiconductor memory device and method for manufacturing the same |
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Semiconductor memory device having spacer capping pattern disposed between burried dielectic pattern and an air gap and method of fabricating same |
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2023-05-30 |
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Semiconductor devices having improved electrical characteristics and methods of fabricating the same |
Taejin Park, Keunnam Kim, Sohyun Park, Jin-Hwan Chun, Wooyoung Choi +2 more |
2023-05-23 |
| 11282787 |
Semiconductor devices having improved electrical characteristics and methods of fabricating the same |
Taejin Park, Keunnam Kim, Sohyun Park, Jin-Hwan Chun, Wooyoung Choi +2 more |
2022-03-22 |