Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776858 | Plasma apparatus and methods of manufacturing semiconductor device using the same | Joonsung Lee, Suhong Kim, Youngwon Shin, Jaehyoung Lee, Hyunjae Jung | 2023-10-03 |
| 11488804 | Shower head assembly and plasma processing apparatus having the same | Youngwon Shin, Heechul Lee, Joonsung Lee, Hyunjae Jung | 2022-11-01 |