Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6385020 | Methods of forming HSG capacitors from nonuniformly doped amorphous silicon layers and HSG capacitors formed thereby | Myeong-Cheol Kim, Jin Won Kim, Ki-Hyun Hwang, Jae Young Park, Bon-Young Koo | 2002-05-07 |
| 6284632 | Method for manufacturing semiconductor device with stagnated process gas | Se-Jin Lee, Jae Chul Lee, Dae Hoon Bae | 2001-09-04 |
| 6238968 | Methods of forming integrated circuit capacitors having protected layers of HSG silicon therein | Young-Sub Yu | 2001-05-29 |
| 5885867 | Methods of forming hemispherical grained silicon layers including anti-nucleation gases | Jong Young Kim | 1999-03-23 |
| 5854095 | Dual source gas methods for forming integrated circuit capacitor electrodes | Man-Sug Kang, Seung-Joon Ahn, Byung Chul Ahn | 1998-12-29 |