Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362200 | Supercritical fluid processing apparatus and substrate processing system including the same | Seohyun Kim, Ohchel Kwon, Sangwoo Kim, Youngchan Kim, Hyunchul Kim +5 more | 2025-07-15 |