Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424439 | Method of depositing atomic layer and method of manufacturing semiconductor device | Hyunjun AHN, Kyoungwoo Hong, Hanhim Kang, Yeongyeop Song | 2025-09-23 |
| 11476151 | Vacuum chuck, substrate processing apparatus including the same and related method of manufacture | Byounghoon Ji, Seoyoung Maeng, Minjoon Kim, Jongyong Bae, Jiho Uh +1 more | 2022-10-18 |
| 10468234 | Gas mixer and semiconductor device fabricating apparatuses including the same | Kangsoo Kim, Hojun Kim, Jeonghoon NAM, Sejun PARK | 2019-11-05 |