Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613693 | Etchant used in the manufacture of semiconductor devices and etching method using the same | Yong-Woo Heo, Jun-ing Gil, Eun-Mi Bae | 2003-09-02 |
| 6548419 | Wet etching system for manufacturing semiconductor devices and wet etching method using the same | Yong-Woo Heo | 2003-04-15 |
| 6398904 | Wet etching system for manufacturing semiconductor devices | Yong-Woo Heo | 2002-06-04 |
| 6033989 | Device for and method of concentrating chemical substances for semiconductor fabrication | Yong-woo Her, Byoung-Woo Son, Mi Kyung Lee | 2000-03-07 |