Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991555 | Plasma processing device | Soo-Beom Jo, Ju Hee Lee, Yong Mun CHANG, Myung-Soo Huh | 2021-04-27 |
| 9524887 | Etching apparatus for substrate and method of etching using the same | Pyoung-Kyu Park, Woo-Youl Park, Min-Kyu Shin, Jung-kun Shin | 2016-12-20 |