Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746540 | Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same | — | 2004-06-08 |
GA
Gye-Tak Ahn
Overall (All Time): #3,481,254 of 4,157,543Top 85%
1
Patents All Time