Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12345521 | Optical measurement apparatus, measuring method using the same, and method of fabricating semiconductor device using the same | Jin Yong Kim, Dae Hoon Han, Wook Kim, Myung-Jun Lee, Sung Ho JANG | 2025-07-01 |
| 10955360 | Structured illumination-based inspection apparatus and inspection method, and semiconductor device fabrication method including structured illumination-based inspection method | Myung-Jun Lee, Ken Ozawa, Wook Kim, Ji Hoon Kang, Kwang Soo Kim | 2021-03-23 |
| 10082662 | 3D refractive index tomography and structured illumination microscopy system using wavefront shaper and method thereof | YongKeun Park, Seungwoo Shin | 2018-09-25 |