Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7425514 | Method of forming material using atomic layer deposition and method of forming capacitor of semiconductor device using the same | Jae-Hyun Yeo, Young Sun Kim, Sung Tae Kim, In Sung Park | 2008-09-16 |
| 7151039 | Method of forming oxide layer using atomic layer deposition method and method of forming capacitor of semiconductor device using the same | Yun-Jung Lee, In Sung Park, Ki-Yeon Park, Jae-Hyun Yeo | 2006-12-19 |
| 7087482 | Method of forming material using atomic layer deposition and method of forming capacitor of semiconductor device using the same | Jae-Hyun Yeo, Young Sun Kim, Sung Tae Kim, In Sung Park | 2006-08-08 |