Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10821572 | Method of controlling a temperature of a chemical mechanical polishing process, temperature control, and CMP apparatus including the temperature control | Suk-Hoon Jeong, Sang Hak Lee, Chang Sun Hwang, Tae Young Kwon, Young Sang Kim +2 more | 2020-11-03 |
| 9153499 | Semiconductor device having metal plug and method of forming the same | Wan-don Kim, Seung Hwan Lee, Beom Seok Kim, Kyu-Ho Cho, Oh-Seong Kwon +2 more | 2015-10-06 |
| 8643075 | Semiconductor device having glue layer and supporter | Wan-don Kim, Beom Seok Kim, Yong-Suk Tak, Kyu-Ho Cho, Seung Hwan Lee +1 more | 2014-02-04 |