Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823932 | Substrate processing system and substrate processing apparatus | Pyongil Cho, Hyeonjun Jeon, Kyoungho Kim | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823932 | Substrate processing system and substrate processing apparatus | Pyongil Cho, Hyeonjun Jeon, Kyoungho Kim | 2023-11-21 |