Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10406567 | Apparatus and methods for substrate processing and manufacturing integrated circuit devices | Won Ho JANG, Sung-bae Kong | 2019-09-10 |
| 6598312 | Wafer drying apparatus | Tae Ho Kim, Nung-Suck Kang | 2003-07-29 |