Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383949 | Method of depositing an ozone-TEOS oxide film to eliminate its base material dependence, and apparatus for forming such a film at several different temperatures | Do Hyung Kim | 2002-05-07 |
| 6328043 | Filtering technique for CVD chamber process gases | Young-Roe Kim, Hyun-Young Kim, Hyun-kuk Ko, Kyung Koo, Ju-Wan Kim +2 more | 2001-12-11 |