Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368022 | RF generating device and semiconductor manufacturing apparatus including the same | Sungyong Lim, Sungyeol Kim, Yongwon Cho, Younghwan Choi, Seungbo Shim +2 more | 2025-07-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368022 | RF generating device and semiconductor manufacturing apparatus including the same | Sungyong Lim, Sungyeol Kim, Yongwon Cho, Younghwan Choi, Seungbo Shim +2 more | 2025-07-22 |