Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9669516 | Apparatus and method for surface treatment of objects | Sung-Choul Lee, Ki-Hong Jung | 2017-06-06 |
| 9421662 | Polishing apparatus | Sung-Choul Lee, Ki-Hong Jung, Soo-Young Kim | 2016-08-23 |
| 6517421 | Polishing head of a chemical and mechanical polishing apparatus for polishing a wafer | — | 2003-02-11 |
| 6340405 | Etching apparatus for manufacturing semiconductor devices | — | 2002-01-22 |
| 6336846 | Chemical-mechanical polishing apparatus and method | Keon-young Ko | 2002-01-08 |