Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791165 | Method of dry etching copper thin film and semiconductor device | Jaesang CHOI | 2023-10-17 |
| 11257684 | Method of dry etching copper thin film | Jaesang CHOI | 2022-02-22 |