Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652187 | Method for fabricating doped interlayer-dielectric film of semiconductor device using a plasma treatment | Changki Hong, Uin Chung, Yongchul Ahn | 1997-07-29 |
| 5405489 | Method for fabricating an interlayer-dielectric film of a semiconductor device by using a plasma treatment prior to reflow | Changki Hong, Uin Chung, Yongchul Ahn | 1995-04-11 |