Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5977553 | Mechanism for preventing metallic ion contamination of a wafer in ion implantation equipment | Sang G. Oh | 1999-11-02 |
CS
Chang-eob Soh
Overall (All Time): #3,665,919 of 4,157,543Top 90%
1
Patents All Time