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Method of multi-stage substrate etching and terahertz oscillator manufactured using the same method |
Chan-wook Baik, Jong Seok Kim, Seong Chan Jun, Sun-il Kim, Jong Min Kim +1 more |
2013-08-20 |
| 8092702 |
Method of multi-stage substrate etching and terahertz oscillator manufactured using the same method |
Chan-wook Baik, Jong Seok Kim, Seong Chan Jun, Sun-il Kim, Jong Min Kim +1 more |
2012-01-10 |
| 7172916 |
Method and apparatus for vacuum-mounting a micro electro mechanical system on a substrate |
Kyu-dong Jung, Hyung Choi, Seok Jin Kang, Seog-woo Hong, Seok-whan Chung +2 more |
2007-02-06 |
| 7148141 |
Method for manufacturing metal structure having different heights |
Dong-sik Shim, Hyung Choi, Hoon Song |
2006-12-12 |
| 7119638 |
Film bulk acoustic resonator having an air gap and a method for manufacturing the same |
O-gweon Seo |
2006-10-10 |
| 7084073 |
Method of forming a via hole through a glass wafer |
Moon-chul Lee, Hyung Choi, Kyu-dong Jung, Mi Jang, Seog-woo Hong +2 more |
2006-08-01 |
| 6835594 |
Metal wiring method for an undercut |
Ci-moo Shong, Seok Jin Kang, Seok-whan Chung, Moon-chul Lee, Kyu-dong Jung +3 more |
2004-12-28 |
